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Vacuum Pumps
Discover our full portfolio of efficient and reliable vacuum pumps. Our range of high-quality vacuum pumps include dry and wet technologies such as screw, rotary vane, scroll pumps, turbomolecular, diffusion pumps, liquid ring vacuum pumps and more. Offering excellent corrosion resistance, low vibration, and quiet operation, our pumps are engineered to handle even the toughest of applications. Every Edwards pump and component will live up to its trusted name in vacuum technology.
Pumps
Category
- Cryo Technology (5)
- Diaphragm Pumps (4)
- Diffusion Pumps (121)
- Dry Claw Pumps (36)
- Dry Screw Pumps (149)
- Dry Scroll Pumps (28)
- Liquid Ring Pumps Double-Stage Plate (19)
- Liquid Ring Pumps Single-Stage Plate (109)
- Mechanical Booster Pumps (75)
- Multistage Roots Pumps (10)
- Oil Injected Screw Pumps (54)
- Oil Rotary Vane Pumps Single-Stage (17)
- Oil Rotary Vane Pumps Two-Stage (98)
- Rotary Piston Pumps (21)
- Turbomolecular Pumps MAG (4)
- Turbomolecular Pumps Mechanical (56)
- UHV Technology (251)
Connection vacuum outlet flange
- 1 1/4" BSPP (or G 1 1/4") Female (13)
- 1 1/4" NPT Female (13)
- 1/8" BSPP (or G 1/8") Female (8)
- 11 mm nozzle (6)
- 15 mm nozzle (8)
- 2 1/2" BSPP (or G 2 1/2") Female (6)
- 2" BSPP (or G 2") Female (5)
- 2" NPT Female (13)
- 3" NPT Female (13)
- 3/4" BSPP (or G 3/4") Female (20)
- 3/8" BSPP (or G 3/8") Female (2)
- 6x8mm hose pushfit (6)
- ASA/ANSI 1 1/2" (4)
- ASA/ANSI 10" (2)
- ASA/ANSI 2 1/2" (3)
- ASA/ANSI 2" (19)
- ASA/ANSI 3" (4)
- ASA/ANSI 4" (30)
- ASA/ANSI 6" (4)
- ASA/ANSI 8" (14)
- DN 10 ISO-KF (NW10) (9)
- DN 100 (19)
- DN 100 ISO-F (31)
- DN 125 (21)
- DN 150 (26)
- DN 16 ISO-KF (NW16) (23)
- DN 160 ISO-F (24)
- DN 200 (7)
- DN 25 ISO-KF (NW25) (142)
- DN 250 (6)
- DN 250 ISO-F (4)
- DN 300 (3)
- DN 40 ISO-F (23)
- DN 40 ISO-KF (NW40) (85)
- DN 50 (28)
- DN 50 ISO-KF (NW50) (53)
- DN 60 (18)
- DN 63 ISO-F (18)
- DN 63 ISO-K (6)
- DN 65 (15)
- DN 80 (8)
- Edwards EHVI (4 x 16.70 mm holes on 235.0 PCD) (7)
- Edwards EHVI - 2" union (24)
- Fitted silencer (2)
- Hose Nozzle 15 mm (8)
- Hose Nozzle, Suitable for 9 mm I.D. Hose (2)
Connection Vacuum Inlet Flange
- 1 1/4" BSPP (or G 1 1/4") Female (13)
- 1 1/4" NPT Female (13)
- 2" BSPP (or G 2") Female (5)
- 2" NPT Female (5)
- 3" BSPP (or G 3") Female (4)
- 3/4" BSPP (or G 3/4") Female (2)
- ASA/ANSI 10" (2)
- ASA/ANSI 12" (24)
- ASA/ANSI 2 1/2" (3)
- ASA/ANSI 2" (6)
- ASA/ANSI 3" (25)
- ASA/ANSI 4" (19)
- ASA/ANSI 6" (8)
- ASA/ANSI 8" (14)
- DN 10 ISO-KF (NW10) (6)
- DN 100 (13)
- DN 100 CF (6") (9)
- DN 100 ISO-F (51)
- DN 100 ISO-K (14)
- DN 125 (9)
- DN 150 (36)
- DN 16 ISO-KF (NW16) (8)
- DN 160 CF (8") (7)
- DN 160 ISO-F (73)
- DN 160 ISO-K (9)
- DN 200 (19)
- DN 200 CF (10") (3)
- DN 200 ISO-F (1)
- DN 200 ISO-K (4)
- DN 25 ISO-KF (NW25) (76)
- DN 250 (7)
- DN 250 ISO-F (11)
- DN 250 ISO-K (9)
- DN 300 (3)
- DN 320 ISO-F (26)
- DN 40 ISO-F (26)
- DN 40 ISO-KF (NW40) (25)
- DN 400 ISO-K (1)
- DN 50 (16)
- DN 50 ISO-KF (NW50) (2)
- DN 500 ISO-K (1)
- DN 500 PN6 (4)
- DN 63 CF (4.5") (5)
- DN 63 ISO-F (77)
- DN 63 ISO-K (9)
- DN 65 (15)
- DN 80 (34)
- Edwards EHVI (12 x 20.60 mm holes on 686.0 PCD) (7)
- Edwards EHVI (8x11 mm holes on 387.4 PCD) (24)
- Hose Nozzle, Suitable for 9 mm I.D. Hose (2)
Cooling Method
- Air Cooling (58)
- Air Cooling (convection) (41)
- Air Cooling (forced - fan) (232)
- Water Cooling (479)
- Water Cooling direct (21)
- Water Cooling Indirect (6)
Pressure Differential Max. @50Hz
- 7000.00 Pa (9)
- 9000.00 Pa (9)
- 11000.00 Pa (9)
- 12000.00 Pa (10)
- 18000.00 Pa (8)
- 19000.00 Pa (2)
- 33300.00 Pa (4)
- 50600.00 Pa (7)
Power Total Rated
- 64.00 W (1)
- 80.00 W (28)
- 90.00 W (1)
- 120.00 W (6)
- 160.00 W (16)
- 450.00 W (9)
- 500.00 W (5)
- 520.00 W (6)
- 550.00 W (2)
- 650.00 W (12)
- 660.00 W (8)
- 700.00 W (5)
- 750.00 W (4)
- 810.00 W (3)
- 1100.00 W (4)
- 1300.00 W (3)
- 1350.00 W (12)
- 1450.00 W (3)
- 1500.00 W (1)
- 1800.00 W (4)
- 11000.00 W (54)
- 1.100 10⁵ W (5)
- 12000.00 W (13)
- 1.320 10⁵ W (4)
- 15000.00 W (21)
- 1.600 10⁵ W (6)
- 18000.00 W (3)
- 18500.00 W (28)
- 19000.00 W (3)
- 2200.00 W (24)
- 2250.00 W (9)
- 2350.00 W (3)
- 22000.00 W (31)
- 22500.00 W (7)
- 2.500 10⁵ W (3)
- 29500.00 W (16)
- 29820.00 W (1)
- 3000.00 W (9)
- 3600.00 W (1)
- 3700.00 W (6)
- 3850.00 W (3)
- 30000.00 W (17)
- 37000.00 W (17)
- 4000.00 W (7)
- 4100.00 W (8)
- 4400.00 W (1)
- 40000.00 W (1)
- 45000.00 W (5)
- 5500.00 W (24)
- 5600.00 W (4)
- 55000.00 W (7)
- 56000.00 W (3)
- 6000.00 W (73)
- 6200.00 W (2)
- 7500.00 W (69)
- 7700.00 W (12)
- 75000.00 W (8)
- 8500.00 W (3)
- 9200.00 W (2)
- 90000.00 W (4)
Pressure Differential Max. @60Hz
- 3300.00 Pa (3)
- 5000.00 Pa (9)
- 6700.00 Pa (10)
- 7500.00 Pa (9)
- 9000.00 Pa (9)
- 12000.00 Pa (2)
- 15000.00 Pa (8)
- 33300.00 Pa (4)
- 50600.00 Pa (8)
Pressure Ultimate
- -2.000 10² Pa (1)
- 135.00 Pa (2)
- 150.00 Pa (2)
- 200.00 Pa (2)
- 335.00 Pa (2)
- 435.00 Pa (2)
- 635.00 Pa (2)
- 735.00 Pa (2)
- 800.00 Pa (2)
- 835.00 Pa (2)
- 3000.00 Pa (56)
- 3300.00 Pa (71)
- 5000.00 Pa (13)
- 7.000 10⁻⁷ Pa (3)
- 0.700 Pa (18)
- 8.00 Pa (7)
- 1.000 10⁻⁶ Pa (6)
- 1.000 10⁻⁸ Pa (2)
- 10.00 Pa (53)
- 1.000 Pa (59)
- 0.100 Pa (101)
- 1.000 10⁻² Pa (79)
- 1.000 10⁻⁵ Pa (10)
- 14000.00 Pa (5)
- 20000.00 Pa (8)
- 2.000 10⁻⁸ Pa (1)
- 20.00 Pa (1)
- 2.00 Pa (7)
- 0.200 Pa (41)
- 0.020 Pa (2)
- 3.000 10⁻⁶ Pa (42)
- 3.000 10⁻⁸ Pa (2)
- 30.00 Pa (4)
- 3.00 Pa (19)
- 0.300 Pa (6)
- 33.00 Pa (2)
- 3.30 Pa (21)
- 0.330 Pa (10)
- 35.00 Pa (38)
- 40.00 Pa (7)
- 5.000 10⁻⁷ Pa (8)
- 5.000 10⁻⁸ Pa (8)
- 50.00 Pa (3)
- 5.00 Pa (16)
- 6.000 10⁻⁶ Pa (4)
- 60.00 Pa (1)
Pumping Speed @50Hz
- 2.083 10⁻⁴ m³/s (2)
- 3.333 10⁻⁴ m³/s (1)
- 4.444 10⁻⁴ m³/s (4)
- 9.167 10⁻⁴ m³/s (9)
- 1.417 10⁻³ m³/s (10)
- 0.010 m³/s (9)
- 0.011 m³/s (3)
- 1.02 m³/s (4)
- 1.02 m³/s (3)
- 0.107 m³/s (1)
- 0.011 m³/s (2)
- 0.012 m³/s (2)
- 0.123 m³/s (13)
- 0.128 m³/s (2)
- 0.015 m³/s (1)
- 1.51 m³/s (4)
- 1.53 m³/s (3)
- 0.017 m³/s (2)
- 0.178 m³/s (3)
- 0.018 m³/s (3)
- 2.361 10⁻³ m³/s (11)
- 0.021 m³/s (9)
- 2.00 m³/s (2)
- 0.022 m³/s (2)
- 0.023 m³/s (3)
- 0.222 m³/s (1)
- 0.023 m³/s (1)
- 0.233 m³/s (1)
- 0.024 m³/s (1)
- 3.333 10⁻³ m³/s (11)
- 4.722 10⁻³ m³/s (13)
- 0.042 m³/s (3)
- 0.044 m³/s (5)
- 0.045 m³/s (1)
- 0.481 m³/s (2)
- 0.482 m³/s (3)
- 0.050 m³/s (1)
- 0.058 m³/s (4)
- 0.065 m³/s (8)
- 0.067 m³/s (2)
- 7.639 10⁻³ m³/s (8)
- 0.071 m³/s (5)
- 0.072 m³/s (1)
- 0.078 m³/s (4)
- 0.079 m³/s (1)
- 0.082 m³/s (2)
- 0.861 m³/s (9)
- 9.722 10⁻³ m³/s (6)
Pumping Speed @60Hz
- 2.639 10⁻⁴ m³/s (2)
- 3.889 10⁻⁴ m³/s (1)
- 5.556 10⁻⁴ m³/s (4)
- 9.722 10⁻⁴ m³/s (6)
- 1.083 10⁻³ m³/s (9)
- 1.722 10⁻³ m³/s (10)
- 0.011 m³/s (2)
- 0.118 m³/s (1)
- 0.012 m³/s (9)
- 0.123 m³/s (13)
- 1.23 m³/s (6)
- 0.013 m³/s (3)
- 0.014 m³/s (2)
- 0.150 m³/s (3)
- 0.018 m³/s (1)
- 1.74 m³/s (4)
- 1.84 m³/s (3)
- 2.778 10⁻³ m³/s (11)
- 0.020 m³/s (2)
- 0.210 m³/s (3)
- 0.022 m³/s (4)
- 0.222 m³/s (1)
- 2.40 m³/s (2)
- 0.025 m³/s (9)
- 0.025 m³/s (3)
- 0.026 m³/s (2)
- 0.028 m³/s (1)
- 0.283 m³/s (2)
- 0.029 m³/s (1)
- 3.944 10⁻³ m³/s (11)
- 5.667 10⁻³ m³/s (13)
- 0.051 m³/s (3)
- 0.054 m³/s (5)
- 0.056 m³/s (1)
- 0.578 m³/s (6)
- 0.058 m³/s (1)
- 0.059 m³/s (1)
- 0.065 m³/s (8)
- 0.078 m³/s (1)
- 0.081 m³/s (2)
- 0.084 m³/s (1)
- 0.085 m³/s (5)
- 9.167 10⁻³ m³/s (8)
- 9.722 10⁻³ m³/s (6)
- 0.092 m³/s (1)
- 0.096 m³/s (3)
Rotational Speed @60Hz Nominal
- 10.83 Hz (2)
- 110.00 Hz (1)
- 12.33 Hz (5)
- 125.00 Hz (1)
- 14.67 Hz (6)
- 14.83 Hz (2)
- 1800.00 Hz (6)
- 19.33 Hz (4)
- 19.50 Hz (9)
- 19.58 Hz (6)
- 20.00 Hz (6)
- 23.67 Hz (9)
- 28.33 Hz (2)
- 28.67 Hz (21)
- 28.83 Hz (18)
- 29.00 Hz (3)
- 29.17 Hz (27)
- 30.00 Hz (67)
- 3600.00 Hz (3)
- 4.50 Hz (6)
- 56.67 Hz (4)
- 56.83 Hz (6)
- 57.17 Hz (3)
- 57.50 Hz (3)
- 58.33 Hz (18)
- 58.33 Hz (27)
- 60.00 Hz (5)
- 71.67 Hz (1)
- 8.83 Hz (3)
- 9.83 Hz (6)
Rotational Speed @50Hz Nominal
- 110.00 Hz (4)
- 12.25 Hz (4)
- 12.33 Hz (9)
- 125.00 Hz (4)
- 1500.00 Hz (6)
- 16.00 Hz (6)
- 16.17 Hz (4)
- 16.33 Hz (15)
- 23.33 Hz (2)
- 24.00 Hz (33)
- 24.17 Hz (27)
- 24.33 Hz (6)
- 24.50 Hz (13)
- 25.00 Hz (57)
- 28.67 Hz (9)
- 3.83 Hz (6)
- 3000.00 Hz (3)
- 46.67 Hz (4)
- 47.33 Hz (6)
- 47.67 Hz (3)
- 48.00 Hz (3)
- 48.33 Hz (9)
- 48.33 Hz (36)
- 50.00 Hz (16)
- 71.67 Hz (1)
- 8.83 Hz (3)
- 9.75 Hz (2)
- 9.83 Hz (6)
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